Feature:

• Full function LCD TOUCH SCREEN PANEL with PLC controller
• Vacuity ＞ 1
• TorrTemp = Max. 200 °C
• Intelligent programmable input function, process change as user define with temperature、vacuum and working hours in each process
• Automatic monitoring and report function checking the status of performance and the faultless, interlock device provide system absolutely security
• HMDS automatically airtight feeding system
• 10 sets program memory and self diagnostic, failure indicate and eliminate indicate function
• Individual cabin airtight testing function ensure the HMDS from leaking
• Capacity : 8 sets 4" wafer cassette

Specification: