Feature:

• Full function LCD TOUCH SCREEN PANEL with PLC controller
• Vacuity > 1
• TorrTemp = Max. 200 °C
• Intelligent programmable input function, process change as user define with temperature、vacuum and working hours in each process
• Automatic monitoring and report function checking the status of performance and the faultless, interlock device provide system absolutely security
• HMDS automatically airtight feeding system
• 1
0 sets program memory and self diagnostic, failure indicate and eliminate indicate function
Individual cabin airtight testing function ensure the HMDS from leaking
• Capacity : 8 sets 4" wafer cassette


Specification:

Model Inner (WxDxH)(Cm) Outside (W x D x H)
VO-30-HMDS 30×30 W81×D48×H77
Note:
1. Special design are acceptable
2.阿摩尼亞機種規格相同

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NEO-SHINY INDUTRIAL CORPORATION
NO.12, TING HU 2ND ST., KUEI SHAN SHIANG,
TAOYUAN HSIEN, TAIWAN, R.O.C.
TEL: 886-3-3287380
FAX: 886-3-3285069

南區服務中心:玖圃科技有限公司
TEL:(07)3740005
e-mail:shiny.sales@msa.hinet.net